World's largest RF, MW, DC, and Plasma Equipment Repair Company
Trusted by Semiconductor OEM, FABS and Coating Leaders Worldwide
Trusted by Semiconductor OEM, FABS and Coating Leaders Worldwide
From RF amplifiers to electrostatic chucks, our engineers have the OEM-level expertise to restore full performance — fast.
Complete depot repair of solid-state and tube-based RF amplifiers across the 13.56 MHz to GHz range for all major OEMs.
Learn more2.45 GHz magnetron and solid-state microwave generator repair for downstream plasma and surface treatment applications.
Learn moreHigh-voltage and precision DC supply repair for sputtering, e-beam evaporation, and ion beam deposition systems.
Learn moreFull system repair including RF generators, bias supplies, and pulsed power units for reactive ion etch and PECVD tools.
Learn moreImpedance matching network repair and recalibration ensuring optimal power transfer and arc suppression in plasma chambers.
Learn moreESC power supply and chuck assembly repair, testing, and requalification for wafer handling in leading-edge process chambers.
Learn moreDecades of specialized expertise, proprietary processes, and a relentless focus on uptime — built for the world's most demanding fabs.
Get a quoteEvery repair process is governed by our ISO 9001:2015 quality management system, ensuring consistent, traceable, and auditable results.
Standard repair cycle completes within 48 hours of receipt. Emergency same-day service available for critical production downtime situations.
Direct OEM supplier relationships ensure we use authentic, specification-grade components — never counterfeit or substandard parts.
Our internally developed RF test benches and plasma load simulators replicate real fab conditions for comprehensive validation before return.
Factory-trained field engineers deployable to any location globally for on-site repair, installation support, and preventive maintenance programs.
All repairs carry a full 12-month performance warranty covering parts and labor — the strongest guarantee in the independent repair industry.
Don't just take our word for it — hear from the equipment engineers and operations teams who rely on us to keep their tools running.
Odyssey RF turned a 3-week OEM lead time into a 48-hour repair. Our etch tool was back online before we even filed the purchase order with the OEM.
"We've been sending our Advanced Energy and MKS generators to Odyssey for over five years. Failure rate post-repair is essentially zero. Their diagnostics bench is better than most OEMs."
"The 12-month warranty isn't just a promise — they actually honor it. We had one unit fail at month 10 and they repaired it at no charge, no questions asked."
"Volume contract pricing made it easy to justify moving our entire repair program to Odyssey. We consolidated from four vendors to one and cut our average downtime by 60%."
Can't find your answer here? Our applications engineers are available to discuss your specific equipment and requirements.
Contact our TeamWe repair RF power generators, microwave generators, DC power supplies, pulsed power systems, impedance matching networks, and electrostatic chuck power supplies from all major OEMs including Advanced Energy, MKS, Comdel, Seren, Huettinger, and more.
Our standard repair cycle is 48 hours from receipt of the unit. Emergency same-day service is available for critical production situations. Most units are evaluated within 4 hours of arrival and a repair estimate provided shortly after.
All repairs carry a full 12-month parts-and-labor warranty from date of return shipment. If a repaired unit fails within the warranty period due to the same fault, we will repair it at no charge including round-trip freight.
Yes. We source components exclusively from authorized OEM distributors and franchised suppliers. We maintain a counterfeit prevention program and all critical components undergo incoming inspection before use in any repair.
We offer tiered volume pricing and annual repair contracts for customers with recurring needs. Contracts include priority scheduling, dedicated account management, fixed flat-rate pricing per model, and quarterly reporting.
Yes. Our worldwide field service team can deploy to any location for on-site diagnostics, in-situ repair, system integration support, and preventive maintenance. Field service is available in North America, Europe, and Asia-Pacific.